Inventor · disambiguated record

Ho-Ta Chuang

Also filed as: CHUANG HO-TA

1 granted patent·0 citations·filing 2014–2014

6Inventor score

Technology areasH01J

Files withTAIWAN SEMICONDUCTOR MFG CO LTD1

Top patents by PatentIndex Score

1 record

0141US9607809B2High density plasma reactor with multiple top coilsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Mar 28, 2017·0 cites·16 claims

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Ho-Ta Chuang — Patent Inventor | PatentIndex