Inventor · disambiguated record
Takumi Komatsu
Also filed as: KOMATSU TAKUMI
1 granted patent·67 citations·filing 2002–2002
51Inventor score
Technology areasH01J
Files withTOKYO ELECTRON LTD1
Top patents by PatentIndex Score
1 recordIdentity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →