Inventor · disambiguated record
Shuji Akiyama
Also filed as: AKIYAMA SHUJI
32 granted patents·7 pending applications·276 citations·filing 1988–2025
96Inventor score
Top patents by PatentIndex Score
39 records- 0190US4899105AMethod of testing electrical characteristics of LCD with probe deviceTOKYO ELECTRON LTD·Filed 1988·Granted Feb 6, 1990·62 cites·10 claims
- 0289US10766804B2Glass film production methodNIPPON ELECTRIC GLASS CO·Filed 2017·Granted Sep 8, 2020·3 cites·6 claims
- 0388US7701236B2Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a waferTOKYO ELECTRON LTD·Filed 2008·Granted Apr 20, 2010·16 cites·17 claims
- 0485US10823778B2Inspection systemTOKYO ELECTRON LTD·Filed 2018·Granted Nov 3, 2020·3 cites·16 claims
- 0585US9914590B2Workpiece conveyance method and workpiece conveyance deviceNIPPON ELECTRIC GLASS CO·Filed 2015·Granted Mar 13, 2018·4 cites·8 claims
- 0684US9684014B2Prober for inspecting semiconductor devices formed on semiconductor waferTOKYO ELECTRON LTD·Filed 2015·Granted Jun 20, 2017·3 cites·7 claims
- 0784US7457680B2Conveyance method for transporting objectsTOKYO ELECTRON LTD·Filed 2006·Granted Nov 25, 2008·10 cites·4 claims
- 0882US6874638B2Wafer cassetteTOKYO ELECTRON LTD·Filed 2002·Granted Apr 5, 2005·28 cites·8 claims
- 0981US7583096B2Probing apparatus and probing methodTOKYO ELECTRON LTD·Filed 2007·Granted Sep 1, 2009·6 cites·11 claims
- 1081US7044703B2Automatic guided vehicle, automatic guided vehicle system and wafer carrying methodTOKYO ELECTRON LTD·Filed 2002·Granted May 16, 2006·29 cites·14 claims
- 1177US10889519B2Method for manufacturing glass rollNIPPON ELECTRIC GLASS CO·Filed 2017·Granted Jan 12, 2021·1 cites·20 claims
- 1272US7283890B2Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey methodTOKYO ELECTRON LTD·Filed 2002·Granted Oct 16, 2007·15 cites·6 claims
- 1370US9383389B2Prober and needle-tip polishing device for probe cardTOKYO ELECTRON LTD·Filed 2015·Granted Jul 5, 2016·1 cites·6 claims
- 1470US7794350B2Turning device for heavy objectTOKYO ELECTRON LTD·Filed 2005·Granted Sep 14, 2010·4 cites·5 claims
- 1569US7153087B2Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering methodTOKYO ELECTRON LTD·Filed 2003·Granted Dec 26, 2006·12 cites·9 claims
- 1667US8007389B2Heavy object turning apparatusNABTESCO CORP·Filed 2005·Granted Aug 30, 2011·3 cites·5 claims
- 1765US7887280B2Processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Feb 15, 2011·2 cites·23 claims
- 1864US6721626B2Wafer transfer system, wafer transfer method and automatic guided vehicle systemTOKYO ELECTRON LTD·Filed 2002·Granted Apr 13, 2004·9 cites·3 claims
- 1964US2025321260A1Inspection device, loader, and transfer methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2063US5798651AProbe systemTOKYO ELECTRON LTD·Filed 1996·Granted Aug 25, 1998·27 cites·17 claims
- 2161US7153079B2Automated guided vehicleTOKYO ELECTRON LTD·Filed 2002·Granted Dec 26, 2006·9 cites·2 claims
- 2259US7741837B2Probe apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Jun 22, 2010·3 cites·4 claims
- 2357US11459264B2Method for producing glass filmNIPPON ELECTRIC GLASS CO·Filed 2018·Granted Oct 4, 2022·0 cites·4 claims
- 2455US11511461B2Glass film manufacturing methodNIPPON ELECTRIC GLASS CO·Filed 2018·Granted Nov 29, 2022·0 cites·4 claims
- 2555US8041097B2Confocal microscopeOLYMPUS CORP·Filed 2008·Granted Oct 18, 2011·1 cites·8 claims
- 2651US11515175B2Wafer inspection apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 29, 2022·0 cites·9 claims
- 2750US8310261B2Probing apparatus and probing methodHOSAKA HIROKI·Filed 2009·Granted Nov 13, 2012·0 cites·20 claims
- 2850US5801527AApparatus and method for testing semiconductor deviceTOKYO ELECTRON LTD·Filed 1995·Granted Sep 1, 1998·16 cites·15 claims
- 2948US9494187B2Fluid bearing, motor and polygon mirror scanner motorMINEBEA CO LTD·Filed 2015·Granted Nov 15, 2016·0 cites·22 claims
- 3047USD592230SWafer carrying-in/out machineTOKYO ELECTRON LTD·Filed 2007·Granted May 12, 2009·6 cites·1 claims
- 3147US2005209725A1Conveyance system, conveyance method and vacuum holding apparatus for object to be processed, and centering method for waferAKIYAMA SHUJI·Filed 2005·Application pending·0 cites
- 3245US2007231110A1Method for handling and transferring a wafer case, and holding part used thereforTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 3339USD607424SWafer carrying-in/out apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jan 5, 2010·3 cites·1 claims
- 3439US2004046545A1Conveyance system, conveyance method and vacuum holding apparatus for object to be processed, and centering method for waterFiled 2001·Application pending·0 cites
- 3538US2005035311A1Inspection apparatusFiled 2004·Application pending·0 cites
- 3638US2017087599A1Method for cleaning glass film and device for cleaning glass filmNIPPON ELECTRIC GLASS CO·Filed 2015·Application pending·0 cites
- 3737US8866503B2Wafer chuck inclination correcting method and probe apparatusISHII KAZUNARI·Filed 2011·Granted Oct 21, 2014·0 cites·10 claims
- 3837US2010310351A1Method for handling and transferring a wafer case, and holding part used thereforTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 3930USD602882SWafer carrying-in/out apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Oct 27, 2009·0 cites·1 claims
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