Inventor · disambiguated record
Patrick Joyce
Also filed as: JOYCE PATRICK · JOYCE PATRICK C · JOYCE PATRICK CHRISTOPHER
7 granted patents·2 pending applications·425 citations·filing 2001–2006
89Inventor score
Top patents by PatentIndex Score
9 records- 0194US6805801B1Method and apparatus to remove additives and contaminants from a supercritical processing solutionNOVELLUS SYSTEMS INC·Filed 2002·Granted Oct 19, 2004·83 cites·32 claims
- 0294US6764552B1Supercritical solutions for cleaning photoresist and post-etch residue from low-k materialsNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 20, 2004·149 cites·25 claims
- 0393US7309418B2Water contaminant indicatorsCLOROX CO·Filed 2006·Granted Dec 18, 2007·31 cites·23 claims
- 0491US6800142B1Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatmentNOVELLUS SYSTEMS INC·Filed 2002·Granted Oct 5, 2004·57 cites·46 claims
- 0591US6715498B1Method and apparatus for radiation enhanced supercritical fluid processingNOVELLUS SYSTEMS INC·Filed 2002·Granted Apr 6, 2004·58 cites·18 claims
- 0689US6951765B1Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactorNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 4, 2005·28 cites·15 claims
- 0775US6905556B1Method and apparatus for using surfactants in supercritical fluid processing of wafersNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 14, 2005·19 cites·12 claims
- 0842US2005109683A1Water contaminant indicatorsFiled 2003·Application pending·0 cites
- 0938US2008264443A1Apparatus and methods for increasing the rate of solute concentration evolution in a supercritical process chamberNOVELLUS SYSTEMS INC·Filed 2004·Application pending·0 cites
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