Inventor · disambiguated record
Yoshikazu Azumaya
Also filed as: AZUMAYA YOSHIKAZU
3 granted patents·1 pending application·1 citations·filing 2015–2019
46Inventor score
Technology areasH01J
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0163US10312057B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jun 4, 2019·1 cites·5 claims
- 0245US10923323B2Plasma generating unit and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Feb 16, 2021·0 cites·6 claims
- 0340US2019279845A1Antenna device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0434US11056318B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jul 6, 2021·0 cites·8 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →