Inventor · disambiguated record

Chiharu Miyata

Also filed as: MIYATA CHIHARU

1 granted patent·12 citations·filing 2001–2001

35Inventor score

Technology areasH10P

Files withYAMANASHI PREFECTURAL FEDERATI1

Top patents by PatentIndex Score

1 record

0160US6472299B2Method and apparatus for treating a substrate with hydrogen radicals at a temperature of less than 40 KYAMANASHI PREFECTURAL FEDERATI·Filed 2001·Granted Oct 29, 2002·12 cites·6 claims

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