Inventor · disambiguated record
Thierry Chevolleau
Also filed as: CHEVOLLEAU THIERRY
3 granted patents·2 pending applications·31 citations·filing 2009–2023
66Inventor score
Top patents by PatentIndex Score
5 records- 0185US9123652B2Multi-level autolimitating etching methodCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2014·Granted Sep 1, 2015·14 cites·17 claims
- 0279US8318586B2Nitrogen-plasma surface treatment in a direct bonding methodLIBRALESSO LAURE·Filed 2009·Granted Nov 27, 2012·17 cites·17 claims
- 0351US2025316450A1Plasma-enhanced deposition reactorUNIV GRENOBLE ALPES·Filed 2023·Application pending·0 cites
- 0451US2025305134A1Capacitively coupled plasma-enhanced atomic layer deposition methodUNIV GRENOBLE ALPES·Filed 2023·Application pending·0 cites
- 0524US8248621B2Method for optical characterisationLICITRA CHRISTOPHE·Filed 2010·Granted Aug 21, 2012·0 cites·22 claims
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