Inventor · disambiguated record
Wataru Nishida
Also filed as: NISHIDA WATARU
3 granted patents·4 pending applications·17 citations·filing 2003–2024
63Inventor score
Top patents by PatentIndex Score
7 records- 0184US12105412B2Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective maskAGC INC·Filed 2024·Granted Oct 1, 2024·0 cites·14 claims
- 0282US2024427227A1Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective maskAGC INC·Filed 2024·Application pending·0 cites
- 0371US7718926B2Film deposition apparatus, film deposition method, monitoring program for film deposition apparatus, and recording medium thereofPANASONIC CORP·Filed 2006·Granted May 18, 2010·7 cites·12 claims
- 0465US2025036020A1Reflective mask blank, reflective mask blank manufacturing method, reflective mask, and reflective mask manufacturing methodAGC INC·Filed 2024·Application pending·0 cites
- 0565US2024231215A9Reflection type mask blank and method for manufacturing sameAGC INC·Filed 2024·Application pending·0 cites
- 0649US7115186B2Liquid material evaporation apparatus for semiconductor manufacturingSTEC INC·Filed 2003·Granted Oct 3, 2006·10 cites·16 claims
- 0732US2015246845A1Method for forming thin filmASAHI GLASS CO LTD·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →