Inventor · disambiguated record
Takeyoshi Ohashi
Also filed as: OHASHI TAKEYOSHI
20 granted patents·3 pending applications·28 citations·filing 2010–2024
91Inventor score
Files withHITACHI HIGH TECH CORP16SOHDA YASUNARI4ISHIJIMA TATSUAKI1OHASHI TAKEYOSHI1SEKIGUCHI TOMOKO1
Top patents by PatentIndex Score
23 records- 0195US12068128B2Charged particle beam systemHITACHI HIGH TECH CORP·Filed 2022·Granted Aug 20, 2024·2 cites·16 claims
- 0281US11276554B2Scanning electron microscope and method for measuring patternHITACHI HIGH TECH CORP·Filed 2020·Granted Mar 15, 2022·1 cites·12 claims
- 0381US9287084B2Aberration corrector and charged particle beam apparatus using the sameHITACHI HIGH TECH CORP·Filed 2015·Granted Mar 15, 2016·3 cites·15 claims
- 0481US2024371601A1Charged Particle Beam SystemHITACHI HIGH TECH CORP·Filed 2024·Application pending·0 cites
- 0578US8704175B2Scanning electron microscopeSOHDA YASUNARI·Filed 2011·Granted Apr 22, 2014·4 cites·14 claims
- 0676US9543053B2Electron beam equipmentHITACHI HIGH TECH CORP·Filed 2014·Granted Jan 10, 2017·3 cites·11 claims
- 0775US10134558B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2015·Granted Nov 20, 2018·2 cites·8 claims
- 0873US8735814B2Electron beam deviceSOHDA YASUNARI·Filed 2011·Granted May 27, 2014·3 cites·16 claims
- 0971US10943762B2Inspection system, image processing device and inspection methodHITACHI HIGH TECH CORP·Filed 2019·Granted Mar 9, 2021·1 cites·15 claims
- 1070US9830524B2Method for estimating shape before shrink and CD-SEM apparatusSEKIGUCHI TOMOKO·Filed 2012·Granted Nov 28, 2017·4 cites·13 claims
- 1166US9305744B2Measuring method, data processing apparatus and electron microscope using sameHITACHI HIGH TECH CORP·Filed 2012·Granted Apr 5, 2016·2 cites·18 claims
- 1264US10446361B2Aberration correction method, aberration correction system, and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Oct 15, 2019·1 cites·15 claims
- 1361US8637820B2Scanning electron microscope and inspection method using sameSOHDA YASUNARI·Filed 2011·Granted Jan 28, 2014·1 cites·19 claims
- 1458US9230775B2Charged particle instrumentOHASHI TAKEYOSHI·Filed 2012·Granted Jan 5, 2016·1 cites·14 claims
- 1558US2025231124A1Inspection device, inspection element, and inspection methodHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 1657US2023411111A1Charged Particle Beam ApparatusHITACHI HIGH TECH CORP·Filed 2023·Application pending·0 cites
- 1756US11670479B2Electron microscope and method of adjusting focus of electron microscopeHITACHI HIGH TECH CORP·Filed 2021·Granted Jun 6, 2023·0 cites·17 claims
- 1852US9443695B2Charged-particle beam deviceHITACHI HIGH TECH CORP·Filed 2013·Granted Sep 13, 2016·0 cites·11 claims
- 1949US9536170B2Measurement method, image processing device, and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Jan 3, 2017·0 cites·20 claims
- 2046US11430106B2Image processing device, image processing method and charged particle microscopeHITACHI HIGH TECH CORP·Filed 2017·Granted Aug 30, 2022·0 cites·4 claims
- 2142US8816277B2Pattern evaluation method, device therefor, and electron beam deviceSOHDA YASUNARI·Filed 2010·Granted Aug 26, 2014·0 cites·22 claims
- 2236US10727024B2Charged particle beam device and aberration correction method for charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2016·Granted Jul 28, 2020·0 cites·12 claims
- 2332US9129775B2Specimen potential measuring method, and charged particle beam deviceISHIJIMA TATSUAKI·Filed 2010·Granted Sep 8, 2015·0 cites·11 claims
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