Inventor · disambiguated record

Hee-Sam Kim

Also filed as: KIM HEE-SAM

1 granted patent·2 citations·filing 2013–2013

18Inventor score

Technology areasH10P

Files withSAMSUNG ELECTRONICS CO LTD1

Top patents by PatentIndex Score

1 record

0163US9583371B2Electrostatic chuck and apparatus for processing a substrate including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Feb 28, 2017·2 cites·15 claims

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