Inventor · disambiguated record
Vitaly J. Berkman
Also filed as: BERKMAN VITALY · BERKMAN VITALY J
3 granted patents·61 citations·filing 1997–2011
68Inventor score
Top patents by PatentIndex Score
3 records- 0186US5932180AOzone and other reactive gas generator cell and systemAPPLIED SCIENCE & TECH INC·Filed 1997·Granted Aug 3, 1999·58 cites·24 claims
- 0263US8480862B2Ozone system for multi-chamber toolsBERKMAN VITALY J·Filed 2011·Granted Jul 9, 2013·2 cites·6 claims
- 0360US7892502B2Ozone system for multi-chamber toolsMKS INSTR INC·Filed 2006·Granted Feb 22, 2011·1 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →