Inventor · disambiguated record
Byung Sup Cho
Also filed as: CHO BYUNG SUP
2 granted patents·13 citations·filing 1998–2007
50Inventor score
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2 records- 0144US7764368B2Method and apparatus for inspecting defects on maskHYNIX SEMICONDUCTOR INC·Filed 2007·Granted Jul 27, 2010·0 cites·17 claims
- 0237US5975108AAutomatic drain collecting and exhausting apparatus for semiconductor fabrication systemLG SEMICON CO LTD·Filed 1998·Granted Nov 2, 1999·13 cites·19 claims
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