Inventor · disambiguated record
Keishi Shionaga
Also filed as: SHIONAGA KEISHI
3 granted patents·4 citations·filing 2009–2022
52Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0182US9857124B2Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jan 2, 2018·4 cites·16 claims
- 0247US12428242B2Information processing apparatus, transfer position correction method, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Sep 30, 2025·0 cites·10 claims
- 0345US8216378B2Reaction tube and heat processing apparatus for a semiconductor processKANEKO HIROFUMI·Filed 2009·Granted Jul 10, 2012·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →