Inventor · disambiguated record
Hsiao-Wei Yeh
Also filed as: YEH HSIAO-WEI
7 granted patents·3 pending applications·55 citations·filing 2007–2014
82Inventor score
Top patents by PatentIndex Score
10 records- 0195US8460856B2Material and method for photolithographyYEH HSIAO-WEI·Filed 2011·Granted Jun 11, 2013·35 cites·18 claims
- 0288US8741552B2Double patterning strategy for contact hole and trench in photolithographyCHEN CHUN-KUANG·Filed 2010·Granted Jun 3, 2014·9 cites·21 claims
- 0376US8158335B2High etch resistant material for double patterningYEH HSIAO-WEI·Filed 2008·Granted Apr 17, 2012·6 cites·17 claims
- 0468US8039195B2Si device making method by using a novel material for packing and unpacking processTAIWAN SEMICONDUCTOR MFG·Filed 2008·Granted Oct 18, 2011·4 cites·17 claims
- 0566US9323155B2Double patterning strategy for contact hole and trench in photolithographyTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Apr 26, 2016·1 cites·20 claims
- 0653US8029969B2Material and method for photolithographyTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Oct 4, 2011·0 cites·19 claims
- 0748US7777184B2Method for photoresist characterization and analysisTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Aug 17, 2010·0 cites·23 claims
- 0847US2010209852A1Track nozzle system for semiconductor fabricationTAIWAN SEMICONDUCTOR MFG·Filed 2009·Application pending·0 cites
- 0939US2014135657A1Management system and method for damage risk of tissue pressureIND TECH RES INST·Filed 2013·Application pending·0 cites
- 1036US2008230798A1Active matrix organic electroluminescent substrate and method of making the sameHUANG SHU-HUI·Filed 2007·Application pending·0 cites
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