Inventor · disambiguated record
Yutaka Hojo
Also filed as: HOJO YUTAKA
7 granted patents·1 pending application·13 citations·filing 2007–2018
78Inventor score
Top patents by PatentIndex Score
8 records- 0175US9990708B2Pattern-measuring apparatus and semiconductor-measuring systemHITACHI HIGH TECH CORP·Filed 2014·Granted Jun 5, 2018·3 cites·5 claims
- 0273US8942464B2Pattern measuring apparatus, and pattern measuring method and programSHIBAHARA TAKUMA·Filed 2011·Granted Jan 27, 2015·4 cites·9 claims
- 0371US10445875B2Pattern-measuring apparatus and semiconductor-measuring systemHITACHI HIGH TECH CORP·Filed 2018·Granted Oct 15, 2019·1 cites·7 claims
- 0469US7772554B2Charged particle systemHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 10, 2010·2 cites·11 claims
- 0566US8959461B2Pattern measurement device and pattern measurement methodSHIBAHARA TAKUMA·Filed 2012·Granted Feb 17, 2015·2 cites·11 claims
- 0663US8199191B2Electron microscope for inspecting dimension and shape of a pattern formed on a waferSATO HIDETOSHI·Filed 2007·Granted Jun 12, 2012·1 cites·6 claims
- 0749US9536170B2Measurement method, image processing device, and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Jan 3, 2017·0 cites·20 claims
- 0838US2015146967A1Pattern evaluation device and pattern evaluation methodHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
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