Inventor · disambiguated record
Mathias Baranyai
Also filed as: BARANYAI MATHIAS
2 granted patents·0 citations·filing 2006–2010
27Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0147US7704889B2Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurementsADVANCED MICRO DEVICES INC·Filed 2006·Granted Apr 27, 2010·0 cites·20 claims
- 0240US8888947B2Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurementsSCHALLER MATTHIAS·Filed 2010·Granted Nov 18, 2014·0 cites·6 claims
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