Inventor · disambiguated record
Koen Kivits
Also filed as: KIVITS KOEN
4 granted patents·13 citations·filing 2004–2009
71Inventor score
Top patents by PatentIndex Score
4 records- 0166US7409302B2Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatusASML NETHERLANDS BV·Filed 2005·Granted Aug 5, 2008·6 cites·18 claims
- 0253US8427627B2Lithographic apparatus and methodsKIVITS KOEN·Filed 2009·Granted Apr 23, 2013·1 cites·25 claims
- 0348US7773235B2Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatusASML NETHERLANDS BV·Filed 2008·Granted Aug 10, 2010·1 cites·19 claims
- 0444US7308368B2Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer programASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·5 cites·20 claims
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