Inventor · disambiguated record
Chiew-Seng Koay
Also filed as: KOAY CHIEW-SENG
3 granted patents·1 pending application·9 citations·filing 2004–2018
57Inventor score
Top patents by PatentIndex Score
4 records- 0166US7361204B1Generator for flux specific bursts of nano-particlesRESEARCH FOUNDATION UNIV CENTRAL FLORIDA INC·Filed 2004·Granted Apr 22, 2008·9 cites·31 claims
- 0249US11054250B2Multi-channel overlay metrologyIBM·Filed 2018·Granted Jul 6, 2021·0 cites·9 claims
- 0332US8025837B2Generator for flux specific bursts on nano-particlesUNIV CENTRAL FLORIDA RES FOUND·Filed 2007·Granted Sep 27, 2011·0 cites·3 claims
- 0432US2009095924A1Electrode design for euv discharge plasma sourceIBM·Filed 2007·Application pending·0 cites
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