Inventor · disambiguated record
Kazuto Umeki
Also filed as: UMEKI Kazuto
2 granted patents·0 citations·filing 2016–2019
26Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0153US11476136B2Substrate processing apparatus and method of adjusting substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Oct 18, 2022·0 cites·3 claims
- 0246US10504757B2Substrate processing apparatus and method of adjusting substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 10, 2019·0 cites·4 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →