Inventor · disambiguated record
Kevin Kemp
Also filed as: KEMP KEVIN · KEMP KEVIN G
11 granted patents·1,301 citations·filing 1992–2007
93Inventor score
Top patents by PatentIndex Score
11 records- 0197US5308741ALithographic method using double exposure techniques, mask position shifting and light phase shiftingMOTOROLA INC·Filed 1992·Granted May 3, 1994·233 cites·28 claims
- 0295US6072163ACombination bake/chill apparatus incorporating low thermal mass, thermally conductive bakeplateFSI INT INC·Filed 1998·Granted Jun 6, 2000·692 cites·87 claims
- 0392US7058488B2Vehicle testing apparatus for measuring a propensity of a vehicle to roll overBURKE E PORTER MACHINERY CO·Filed 2003·Granted Jun 6, 2006·49 cites·22 claims
- 0492US5885856AIntegrated circuit having a dummy structure and method of makingMOTOROLA INC·Filed 1996·Granted Mar 23, 1999·160 cites·20 claims
- 0584US7054727B2Method of measuring a propensity of a vehicle to roll overBURKE E PORTER MACHINERY CO·Filed 2003·Granted May 30, 2006·26 cites·24 claims
- 0681US5525542AMethod for making a semiconductor device having anti-reflective coatingMOTOROLA INC·Filed 1995·Granted Jun 11, 1996·65 cites·17 claims
- 0777US7709816B2Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabricationSEMATECH INC·Filed 2007·Granted May 4, 2010·5 cites·19 claims
- 0867US5292623AMethod for forming integrated circuit devices using a phase shifting maskMOTOROLA INC·Filed 1992·Granted Mar 8, 1994·21 cites·15 claims
- 0966US6099272APeristaltic pump with flow controlFSI INT·Filed 1997·Granted Aug 8, 2000·27 cites·19 claims
- 1057US6599560B1Liquid coating device with barometric pressure compensationFSI INT INC·Filed 1999·Granted Jul 29, 2003·22 cites·24 claims
- 1143US7238239B2Liquid coating device with barometric pressure compensationFSI INT INC·Filed 2003·Granted Jul 3, 2007·1 cites·20 claims
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