Inventor · disambiguated record

Maarten Van Beijnum

Also filed as: VAN BEIJNUM MAARTEN

3 granted patents·13 citations·filing 2013–2018

65Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV3

Top patents by PatentIndex Score

3 records

0195US9507275B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·10 cites·20 claims
0286US10120292B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 6, 2018·2 cites·20 claims
0380US10747125B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Aug 18, 2020·1 cites·20 claims

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