Inventor · disambiguated record
Hiroaki Kurishima
Also filed as: KURISHIMA HIROAKI
4 granted patents·1 pending application·42 citations·filing 2002–2005
76Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
5 records- 0175US7510611B2Coating film forming method and apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Mar 31, 2009·4 cites·14 claims
- 0275US6884294B2Coating film forming method and apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Apr 26, 2005·16 cites·9 claims
- 0375US6776845B2Coating film forming method and systemTOKYO ELECTRON LTD·Filed 2002·Granted Aug 17, 2004·16 cites·3 claims
- 0460US7488505B2Coating film forming method and systemTOKYO ELECTRON LTD·Filed 2004·Granted Feb 10, 2009·6 cites·16 claims
- 0536US2004261701A1Coating apparatus and coating methodFiled 2002·Application pending·0 cites
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