Inventor · disambiguated record
Jun Ookura
Also filed as: OOKURA JUN
15 granted patents·2 pending applications·337 citations·filing 2000–2011
94Inventor score
Top patents by PatentIndex Score
17 records- 0192US6402509B1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Jun 11, 2002·53 cites·3 claims
- 0289US6644965B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Nov 11, 2003·43 cites·21 claims
- 0388US6507770B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Jan 14, 2003·47 cites·16 claims
- 0487US6461438B1Heat treatment unit, cooling unit and cooling treatment methodTOKYO ELECTRON LTD·Filed 2000·Granted Oct 8, 2002·34 cites·7 claims
- 0584US6654668B1Processing apparatus, processing system, distinguishing method, and detecting methodTOKYO ELECTRON LTD·Filed 2000·Granted Nov 25, 2003·36 cites·21 claims
- 0682US6686571B2Heat treatment unit, cooling unit and cooling treatment methodTOKYO ELECTRON LTD·Filed 2002·Granted Feb 3, 2004·24 cites·14 claims
- 0779US7868270B2Temperature control for performing heat process in coating/developing system for resist filmTOKYO ELECTRON LTD·Filed 2008·Granted Jan 11, 2011·7 cites·18 claims
- 0878US6973370B2Substrate processing apparatus and method for adjusting a substrate transfer positionTOKYO ELECTRON LTD·Filed 2004·Granted Dec 6, 2005·23 cites·20 claims
- 0975US7510611B2Coating film forming method and apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Mar 31, 2009·4 cites·14 claims
- 1075US6884294B2Coating film forming method and apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Apr 26, 2005·16 cites·9 claims
- 1175US6776845B2Coating film forming method and systemTOKYO ELECTRON LTD·Filed 2002·Granted Aug 17, 2004·16 cites·3 claims
- 1273US7755003B2Temperature control for performing heat process on resist filmTOKYO ELECTRON LTD·Filed 2007·Granted Jul 13, 2010·5 cites·17 claims
- 1369US6332751B1Transfer device centering method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Dec 25, 2001·11 cites·16 claims
- 1465US6620245B2Liquid coating apparatus with temperature controlling manifoldTOKYO ELECTRON LTD·Filed 2001·Granted Sep 16, 2003·12 cites·14 claims
- 1560US7488505B2Coating film forming method and systemTOKYO ELECTRON LTD·Filed 2004·Granted Feb 10, 2009·6 cites·16 claims
- 1636US2004261701A1Coating apparatus and coating methodFiled 2002·Application pending·0 cites
- 1732US2012031892A1Heat Treatment Method, Recording Medium Having Recorded Program for Executing Heat Treatment Method, and Heat Treatment ApparatusSHIGETOMI KENICHI·Filed 2011·Application pending·0 cites
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