Inventor · disambiguated record
Shigeo Nakada
Also filed as: NAKADA SHIGEO
4 granted patents·40 citations·filing 1990–2013
72Inventor score
Top patents by PatentIndex Score
4 records- 0185US8851886B2Substrate processing apparatus and method of manufacturing semiconductor deviceMORITA SHINYA·Filed 2009·Granted Oct 7, 2014·11 cites·19 claims
- 0266US5085814AProduction process of expansion-molded articleJSP CORP·Filed 1990·Granted Feb 4, 1992·27 cites·13 claims
- 0357US9460945B2Substrate processing apparatus for semiconductor devicesNAKADA SHIGEO·Filed 2007·Granted Oct 4, 2016·2 cites·9 claims
- 0444US9628689B2Image pickup element unit and image pickup apparatus with heat generating memberHITACHI INT ELECTRIC INC·Filed 2013·Granted Apr 18, 2017·0 cites·10 claims
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