Inventor · disambiguated record
Masato Kamada
Also filed as: KAMADA MASATO
3 granted patents·52 citations·filing 1999–2010
68Inventor score
Top patents by PatentIndex Score
3 records- 0172US6674086B2Electron beam lithography system, electron beam lithography apparatus, and method of lithographyHITACHI LTD·Filed 1999·Granted Jan 6, 2004·28 cites·10 claims
- 0269US6828573B1Electron beam lithography systemHITACHI LTD·Filed 1999·Granted Dec 7, 2004·24 cites·10 claims
- 0339US8377179B2Moisture control module, process for producing the moisture control module, and apparatus for producing the moisture control moduleAGC ENGINEERING CO LTD·Filed 2010·Granted Feb 19, 2013·0 cites·5 claims
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