Inventor · disambiguated record

Minoru Wakita

Also filed as: WAKITA MINORU

2 granted patents·52 citations·filing 1999–1999

65Inventor score

Technology areasH01J

Files withHITACHI LTD2

Top patents by PatentIndex Score

2 records

0172US6674086B2Electron beam lithography system, electron beam lithography apparatus, and method of lithographyHITACHI LTD·Filed 1999·Granted Jan 6, 2004·28 cites·10 claims
0269US6828573B1Electron beam lithography systemHITACHI LTD·Filed 1999·Granted Dec 7, 2004·24 cites·10 claims

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Minoru Wakita — Patent Inventor | PatentIndex