Inventor · disambiguated record

Max Biberger

Also filed as: BIBERGER MAX

1 granted patent·92 citations·filing 2000–2000

52Inventor score

Technology areasH10P

Files withNOVELLUS SYSTEMS INC1

Top patents by PatentIndex Score

1 record

0190US6342133B2PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutterNOVELLUS SYSTEMS INC·Filed 2000·Granted Jan 29, 2002·92 cites·12 claims

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