Inventor · disambiguated record
Nicolaas Petrus Van Der Aa
Also filed as: VAN DER AA NICOLAAS P · VAN DER AA NICOLAAS PETRUS
2 granted patents·1 pending application·4 citations·filing 2003–2006
42Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0150US7288779B2Method for position determination, method for overlay optimization, and lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Oct 30, 2007·4 cites·31 claims
- 0240US7649636B2Optical metrology system and metrology mark characterization deviceASML NETHERLANDS BV·Filed 2006·Granted Jan 19, 2010·0 cites·18 claims
- 0337US2007153274A1Optical metrology system and metrology mark characterization deviceASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
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