Inventor · disambiguated record
Carsten Kohler
Also filed as: KOHLER CARSTEN · KOHLER CARSTEN A · KOHLER CARSTEN ANDREAS · KÖHLER CARSTEN ANDREAS
7 granted patents·1 pending application·149 citations·filing 2002–2019
84Inventor score
Top patents by PatentIndex Score
8 records- 0195US7245355B2Lithographic apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 17, 2007·35 cites·24 claims
- 0292US6809797B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Oct 26, 2004·71 cites·34 claims
- 0390US7245353B2Lithographic apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 17, 2007·38 cites·18 claims
- 0457US7374869B2Lithographic processing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted May 20, 2008·5 cites·22 claims
- 0548US11474436B2Tuning patterning apparatus based on optical characteristicASML NETHERLANDS BV·Filed 2019·Granted Oct 18, 2022·0 cites·20 claims
- 0642US9280064B2Lithographic method and apparatusENGBLOM PETER DAVID·Filed 2012·Granted Mar 8, 2016·0 cites·20 claims
- 0742US8717540B2Calculating a laser metric within a lithographic apparatus and method thereofKÖHLER CARSTEN ANDREAS·Filed 2011·Granted May 6, 2014·0 cites·19 claims
- 0835US2005136340A1Lithographic apparatus and methods, patterning structure and method for making a patterning structure, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
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