Inventor · disambiguated record
Dai Kumagai
Also filed as: KUMAGAI DAI
3 granted patents·1 pending application·24 citations·filing 2006–2016
68Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0190US8578953B2Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage mediumTAKIGUCHI YASUSHI·Filed 2007·Granted Nov 12, 2013·17 cites·21 claims
- 0284US9716002B2Substrate cleaning methodTOKYO ELECTRON LTD·Filed 2016·Granted Jul 25, 2017·3 cites·15 claims
- 0372US7766566B2Developing treatment apparatus and developing treatment methodTOKYO ELECTRON LTD·Filed 2006·Granted Aug 3, 2010·4 cites·28 claims
- 0453US2014102474A1Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →