Inventor · disambiguated record
Tetsuya Yashima
Also filed as: YASHIMA TETSUYA
5 granted patents·25 citations·filing 2004–2018
74Inventor score
Technology areasH10P
Files withEBARA CORP5
Top patents by PatentIndex Score
5 records- 0177US7445543B2Polishing apparatusEBARA CORP·Filed 2004·Granted Nov 4, 2008·19 cites·21 claims
- 0276US10688622B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·19 claims
- 0370US7942725B2Polishing apparatusEBARA CORP·Filed 2008·Granted May 17, 2011·3 cites·13 claims
- 0468US10573509B2Cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 25, 2020·1 cites·11 claims
- 0541US11869788B2Substrate processing deviceEBARA CORP·Filed 2018·Granted Jan 9, 2024·0 cites·36 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →