Inventor · disambiguated record
Marc Van Kemenade
Also filed as: VAN KEMENADE MARC
4 granted patents·1 pending application·32 citations·filing 2009–2015
70Inventor score
Top patents by PatentIndex Score
5 records- 0192US8208121B2Alignment mark and a method of aligning a substrate comprising such an alignment markBIJNEN FRANCISCUS GODEFRIDUS CASPER·Filed 2009·Granted Jun 26, 2012·24 cites·34 claims
- 0280US8711329B2Lithographic apparatus and device manufacturing methodVAN KEMENADE MARC·Filed 2011·Granted Apr 29, 2014·7 cites·20 claims
- 0357US8908152B2Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structuresBIJNEN FRANCISCUS GODEFRIDUS CASPER·Filed 2009·Granted Dec 9, 2014·1 cites·22 claims
- 0441US10948421B2Laser-driven photon source and inspection apparatus including such a laser-driven photon sourceASML NETHERLANDS BV·Filed 2015·Granted Mar 16, 2021·0 cites·14 claims
- 0537US2012218533A1Method of calculating model parameters of a substrate, a lithographic apparatus and an apparatus for controlling lithographic processing by a lithographic apparatusLYULINA IRINA·Filed 2012·Application pending·0 cites
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