Inventor · disambiguated record
Takeshi Kurohori
Also filed as: KUROHORI TAKESHI
3 granted patents·14 citations·filing 2007–2010
64Inventor score
Top patents by PatentIndex Score
3 records- 0182US7705327B2Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithographyNUFLARE TECHNOLOGY INC·Filed 2007·Granted Apr 27, 2010·8 cites·6 claims
- 0271US8461555B2Charged particle beam writing method and charged particle beam writing apparatusKUROHORI TAKESHI·Filed 2010·Granted Jun 11, 2013·4 cites·4 claims
- 0367US7605383B2Pattern writing apparatus using charged particle beam, and program-recorded readable recording mediumNUFLARE TECHNOLOGY INC·Filed 2007·Granted Oct 20, 2009·2 cites·13 claims
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