Inventor · disambiguated record
Chi-Chan Tseng
Also filed as: TSENG CHI-CHAN
3 granted patents·10 citations·filing 2004–2006
58Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0160US7067409B2Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistanceTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Jun 27, 2006·10 cites·25 claims
- 0244US7378744B2Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistanceTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted May 27, 2008·0 cites·20 claims
- 0344US7358612B2Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistanceTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Apr 15, 2008·0 cites·20 claims
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