Inventor · disambiguated record

Harmen Klaus Van Der Schoot

Also filed as: VAN DER SCHOOT HARMEN KLAUS

1 granted patent·0 citations·filing 2006–2006

13Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0151US7656502B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Feb 2, 2010·0 cites·29 claims

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