Inventor · disambiguated record
Keiji Tabuki
Also filed as: TABUKI KEIJI
2 granted patents·4 pending applications·0 citations·filing 2013–2025
23Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0160US2025382698A1Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0250US12237167B2Deposition methodTOKYO ELECTRON LTD·Filed 2022·Granted Feb 25, 2025·0 cites·4 claims
- 0350US11923177B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Mar 5, 2024·0 cites·13 claims
- 0449US2025382697A1Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0534US2014106577A1Method and apparatus of forming silicon nitride filmTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0630US2015376789A1Vertical heat treatment apparatus and method of operating vertical heat treatment apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →