Inventor · disambiguated record
Yu-Liang Yeh
Also filed as: YEH YU-LIANG
2 granted patents·1 pending application·0 citations·filing 2017–2022
25Inventor score
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3 records- 0163US12463065B2Gas flow control during semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
- 0250US2022051912A1Gas flow control during semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Application pending·0 cites
- 0339US10067012B2Stress measurement method and system for optical materialsUNIV NAT TSING HUA·Filed 2017·Granted Sep 4, 2018·0 cites·15 claims
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