Inventor · disambiguated record
Michael Mühlbeyer
Also filed as: MUEHLBEYER MICHAEL · MüHLBEYER MICHAEL
7 granted patents·163 citations·filing 2000–2019
87Inventor score
Top patents by PatentIndex Score
7 records- 0190US6191898B1Optical imaging device, particularly an objective, with at least one optical elementZEISS STIFTUNG·Filed 2000·Granted Feb 20, 2001·62 cites·12 claims
- 0288US6867913B26-mirror microlithography projection objectiveZEISS CARL SMT AG·Filed 2001·Granted Mar 15, 2005·31 cites·23 claims
- 0387US7710542B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2007·Granted May 4, 2010·7 cites·23 claims
- 0486US6844994B2Optical element deformation systemZEISS CARL SMT AG·Filed 2001·Granted Jan 18, 2005·34 cites·45 claims
- 0582US7603010B2Device consisting of at least one optical elementZEISS CARL SMT AG·Filed 2006·Granted Oct 13, 2009·10 cites·22 claims
- 0675US6750949B2Lithographic apparatus and device manufacturing methodAMSL NETHERLANDS BV·Filed 2002·Granted Jun 15, 2004·19 cites·28 claims
- 0750US11324565B2Stand for a surgical microscope, surgical microscopy system, and method for optimizing an assembly space of a surgical microscopy systemZEISS CARL MEDITEC AG·Filed 2019·Granted May 10, 2022·0 cites·17 claims
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