Inventor · disambiguated record
Shohei Shima
Also filed as: SHIMA SHOHEI
6 granted patents·7 pending applications·116 citations·filing 1996–2021
81Inventor score
Top patents by PatentIndex Score
13 records- 0182US5723367AWiring forming methodTOSHIBA KK·Filed 1996·Granted Mar 3, 1998·77 cites·6 claims
- 0277US6552434B2Semiconductor device and manufacturing method thereofTOSHIBA KK·Filed 2002·Granted Apr 22, 2003·18 cites·3 claims
- 0376US7262849B2Method of polishing thin film formed on substrateEBARA CORP·Filed 2005·Granted Aug 28, 2007·5 cites·5 claims
- 0453US6403462B1Method for manufacturing high reliability interconnection having diffusion barrier layerTOSHIBA KK·Filed 1999·Granted Jun 11, 2002·16 cites·44 claims
- 0546US2010043839A1Substrate processing methodHAMADA SATOMI·Filed 2009·Application pending·0 cites
- 0645US12101073B2Method for determining a cleanliness of a cleaning memberEBARA CORP·Filed 2021·Granted Sep 24, 2024·0 cites·8 claims
- 0744US2009197510A1Polishing method and apparatusSHIMA SHOHEI·Filed 2008·Application pending·0 cites
- 0842US2020116480A1Substrate cleaning method, substrate cleaning apparatus, substrate processing apparatus, substrate processing system, machine learning device, and prediction deviceEBARA CORP·Filed 2019·Application pending·0 cites
- 0939US8205625B2Apparatus and method for surface treatment of substrate, and substrate processing apparatus and methodTATEISHI HIDEKI·Filed 2007·Granted Jun 26, 2012·0 cites·5 claims
- 1039US2007289604A1Substrate Processing ApparatusFUKUNAGA YUKIO·Filed 2005·Application pending·0 cites
- 1138US2005026455A1Substrate processing apparatus and substrate processing methodFiled 2004·Application pending·0 cites
- 1236US2004219298A1Substrate processing method and substrate processing apparatusFiled 2004·Application pending·0 cites
- 1335US2010097607A1Film Thickness Measuring Method and Substrate Processing ApparatusSUSAKI AKIRA·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →