Inventor · disambiguated record
Zengdi Lian
Also filed as: LIAN ZENGDI
2 granted patents·0 citations·filing 2020–2021
22Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0150US12094693B2Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ringADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Sep 17, 2024·0 cites·20 claims
- 0241US11348763B2Corrosion-resistant structure for a gas delivery system in a plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted May 31, 2022·0 cites·9 claims
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