Inventor · disambiguated record
Irene Ament
Also filed as: AMENT IRENE
6 granted patents·3 citations·filing 2015–2019
69Inventor score
Files withZEISS CARL SMT GMBH6
Top patents by PatentIndex Score
6 records- 0169US10649340B2Reflective optical element for EUV lithographyZEISS CARL SMT GMBH·Filed 2019·Granted May 12, 2020·1 cites·18 claims
- 0265US10061205B2Reflective optical elementZEISS CARL SMT GMBH·Filed 2017·Granted Aug 28, 2018·1 cites·20 claims
- 0363US10690812B2Optical element and optical system for EUV lithography, and method for treating such an optical elementZEISS CARL SMT GMBH·Filed 2015·Granted Jun 23, 2020·1 cites·17 claims
- 0455US11256182B2Process for cleaning optical elements for the ultraviolet wavelength rangeZEISS CARL SMT GMBH·Filed 2019·Granted Feb 22, 2022·0 cites·16 claims
- 0554US10712677B2Projection exposure system for semiconductor lithography, comprising elements for plasma conditioningZEISS CARL SMT GMBH·Filed 2018·Granted Jul 14, 2020·0 cites·18 claims
- 0645US10627217B2Method for determining the thickness of a contaminating layer and/or the type of contaminating material, optical element and EUV-lithography systemZEISS CARL SMT GMBH·Filed 2017·Granted Apr 21, 2020·0 cites·14 claims
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