Inventor · disambiguated record
Koichi Tateshita
Also filed as: TATESHITA KOICHI
4 granted patents·3 pending applications·47 citations·filing 2002–2019
71Inventor score
Top patents by PatentIndex Score
7 records- 0186US7338576B2Plasma processing deviceTOKYO ELECTRON LTD·Filed 2002·Granted Mar 4, 2008·41 cites·12 claims
- 0274US10950418B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 16, 2021·2 cites·19 claims
- 0366US8419337B2Gate valve and substrate processing system using sameTATESHITA KOICHI·Filed 2010·Granted Apr 16, 2013·4 cites·20 claims
- 0446US2011232846A1Magnetic field generator for magnetron plasmaSHINETSU CHEMICAL CO·Filed 2011·Application pending·0 cites
- 0543US10950415B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 16, 2021·0 cites·8 claims
- 0640US2005211383A1Magnetron plasma-use magnetic field generation deviceMIYATA KOJI·Filed 2003·Application pending·0 cites
- 0735US2013004267A1Gate valve and substrate processing system using sameTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →