Inventor · disambiguated record
Linda M. Ephrath
Also filed as: EPHRATH LINDA M
4 granted patents·218 citations·filing 1979–1986
82Inventor score
Files withIBM4
Top patents by PatentIndex Score
4 records- 0188US4473598AMethod of filling trenches with silicon and structuresIBM·Filed 1982·Granted Sep 25, 1984·74 cites·26 claims
- 0286US4283249AReactive ion etchingIBM·Filed 1979·Granted Aug 11, 1981·55 cites·35 claims
- 0384US4675072ATrench etch endpoint detection by LIFIBM·Filed 1986·Granted Jun 23, 1987·74 cites·43 claims
- 0471US4426274AReactive ion etching apparatus with interlaced perforated anodeIBM·Filed 1981·Granted Jan 17, 1984·15 cites·34 claims
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