Inventor · disambiguated record
Nini Munoz
Also filed as: MUNOZ NINI
3 granted patents·12 citations·filing 2013–2016
64Inventor score
Technology areasH01J
Top patents by PatentIndex Score
3 records- 0186US9293301B2In situ control of ion angular distribution in a processing apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Mar 22, 2016·7 cites·15 claims
- 0278US9620335B2In situ control of ion angular distribution in a processing apparatusVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Apr 11, 2017·2 cites·14 claims
- 0375US9336998B2Apparatus and method for dynamic control of ion beam energy and angleVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted May 10, 2016·3 cites·18 claims
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