Inventor · disambiguated record

Takaaki Terashi

Also filed as: TERASHI TAKAAKI

3 granted patents·39 citations·filing 2002–2006

63Inventor score

Technology areasG03F

Files withCANON KK3

Top patents by PatentIndex Score

3 records

0183US6934009B2Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating methodCANON KK·Filed 2002·Granted Aug 23, 2005·38 cites·6 claims
0261US8035668B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Oct 11, 2011·1 cites·14 claims
0340US7623219B2Exposure apparatus, exposure method, device manufacturing methodCANON KK·Filed 2006·Granted Nov 24, 2009·0 cites·10 claims

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