Inventor · disambiguated record
Keiko Emi
Also filed as: EMI KEIKO
7 granted patents·82 citations·filing 2006–2011
86Inventor score
Top patents by PatentIndex Score
7 records- 0191US7740991B2Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beamNUFLARE TECHNOLOGY INC·Filed 2006·Granted Jun 22, 2010·19 cites·18 claims
- 0291US7525110B2Multiple irradiation effect-corrected dose determination technique for charged particle beam lithographyNUFLARE TECHNOLOGY INC·Filed 2007·Granted Apr 28, 2009·14 cites·17 claims
- 0391US7511290B2Charged particle beam writing method and apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Mar 31, 2009·16 cites·19 claims
- 0490US8352889B2Beam dose computing method and writing method and record carrier body and writing apparatusNUFLARE TECHNOLOGY INC·Filed 2011·Granted Jan 8, 2013·5 cites·5 claims
- 0587US7669174B2Pattern generation method and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Feb 23, 2010·10 cites·11 claims
- 0686US7619230B2Charged particle beam writing method and apparatus and readable storage mediumNUFLARE TECHNOLOGY INC·Filed 2006·Granted Nov 17, 2009·10 cites·15 claims
- 0777US8103980B2Beam dose computing method and writing method and record carrier body and writing apparatusEMI KEIKO·Filed 2009·Granted Jan 24, 2012·8 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →