Inventor · disambiguated record
Kouichirou Komatsu
Also filed as: KOMATSU KOUICHIROU
3 granted patents·273 citations·filing 1991–1995
78Inventor score
Technology areasG03F
Files withNIKON CORP3
Top patents by PatentIndex Score
3 records- 0194US5506684AProjection scanning exposure apparatus with synchronous mask/wafer alignment systemNIKON CORP·Filed 1995·Granted Apr 9, 1996·172 cites·27 claims
- 0284US5184196AProjection exposure apparatusNIKON CORP·Filed 1991·Granted Feb 2, 1993·53 cites·7 claims
- 0380US5689339AAlignment apparatusNIKON CORP·Filed 1995·Granted Nov 18, 1997·48 cites·18 claims
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