Inventor · disambiguated record

Steffen Winkler

Also filed as: WINKLER STEFFEN

1 granted patent·0 citations·filing 2011–2011

7Inventor score

Technology areasG03B

Files withWINKLER STEFFEN1

Top patents by PatentIndex Score

1 record

0127US8699000B2Illumination system for a lithographic apparatusWINKLER STEFFEN·Filed 2011·Granted Apr 15, 2014·0 cites·20 claims

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