Inventor · disambiguated record
William G. Callahan
Also filed as: CALLAHAN WILLIAM G · CALLAHAN WILLIAM GRAY
3 granted patents·1 pending application·183 citations·filing 1998–2007
74Inventor score
Top patents by PatentIndex Score
4 records- 0188US7355188B2Technique for uniformity tuning in an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Apr 8, 2008·13 cites·13 claims
- 0287US6374144B1Method and apparatus for controlling a system using hierarchical state machinesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1998·Granted Apr 16, 2002·162 cites·31 claims
- 0383US7663125B2Ion beam current uniformity monitor, ion implanter and related methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 16, 2010·8 cites·18 claims
- 0447US2008245957A1Tuning an ion implanter for optimal performanceGUPTA ATUL·Filed 2007·Application pending·0 cites
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