Inventor · disambiguated record
Adam Mace
Also filed as: MACE ADAM · MACE ADAM CHRISTOPHER
2 granted patents·10 pending applications·118 citations·filing 2013–2025
60Inventor score
Files withLAM RES CORP12
Top patents by PatentIndex Score
12 records- 0193US8970114B2Temperature controlled window of a plasma processing chamber componentLAM RES CORP·Filed 2013·Granted Mar 3, 2015·118 cites·20 claims
- 0277US2024266151A1Ring structures and systems for use in a plasma chamberLAM RES CORP·Filed 2024·Application pending·0 cites
- 0376US2024162015A1Ring structures and systems for use in a plasma chamberLAM RES CORP·Filed 2024·Application pending·0 cites
- 0476US2025316459A1Electrostatic edge ring mounting system for substrate processingLAM RES CORP·Filed 2025·Application pending·0 cites
- 0565US12340989B2Electrostatic edge ring mounting system for substrate processingLAM RES CORP·Filed 2021·Granted Jun 24, 2025·0 cites·25 claims
- 0654US2020365378A1Ring Structures and Systems for Use in a Plasma ChamberLAM RES CORP·Filed 2017·Application pending·0 cites
- 0746US2023133798A1Cooled edge ring with integrated sealsLAM RES CORP·Filed 2021·Application pending·0 cites
- 0846US2025079132A1Plasma radical edge ring barrier sealLAM RES CORP·Filed 2022·Application pending·0 cites
- 0945US2021354231A1Friction stir welding for ceramic applicationsLAM RES CORP·Filed 2019·Application pending·0 cites
- 1045US2023128551A1Edge ring for localized delivery of tuning gasLAM RES CORP·Filed 2021·Application pending·0 cites
- 1142US2022005675A1Dual-phase cooling in semiconductor manufacturingLAM RES CORP·Filed 2019·Application pending·0 cites
- 1240US2023369028A1Wear Compensating Confinement RingLAM RES CORP·Filed 2020·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →